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ISO 3530:1979
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ISO 3530:1979 Vacuum technology -- Mass-spectrometer-type leak-detector calibration
standard by International Organization for Standardization, 09/01/1979
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Full Description
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.